Cmos Cantilever Sensor Systems
Dirk Lange
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| Description: |
- This is an introduction to the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers allow the sensitive detection of physical quantities such as forces and mass changes.
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| Publisher: |
- Springer-Verlag Berlin And Heidelberg Gmbh & Co. Kg
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| Genre: |
- Applied Physics & Special Topics
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Description
Release Date:
23 July 2002
This is an introduction to the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers allow the sensitive detection of physical quantities such as forces and mass changes.
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